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Si/SiGe CMOS工艺中纳秒激光退火降低外阻


作者:1Oleg Gluschenkov, 1wu heng, 1Kevin Brew, 2牛成宇,1yu lan, 1Yasir Sulehria, 1Samuel Choi, 22Curtis Durfee, 1James Demarest, 1Adra Carr, 3陈少银,3Jim Willis, 3Thirumal Thanigaivelan, 1lie fee -li, 2Walter Kleemeier, 1dec超郭德超,1IBM Research, 257 Fuller Road, Albany, NY 12203, email:(电子邮件保护)2GLOBALFOUNDRIES公司,奥尔巴尼,纽约,美国,3ULTRATECH,一个部门…»阅读更多

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