作者:Barak Bringoltz, Tal Marciano, Tal Yaziv, Yaron DeLeeuw, Dana Klein, Yoel Feler, Ido Adam, Evgeni Gurevich, Noga Sella, Ze 'ev Lindenfeld, Tom Leviant, Lilach Saltoun, Eltsafon Ashwal, Dror Alumot和Yuval Lamhot, xeast Gao, James Manka, Bryan Chen和Mark Wagner。摘要本文讨论了工艺变化决定光学光学光栅叠加精度的机理。
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